SmallTech Extended Team Profile

Benjamin Chui , Ph.D.

Dr. Benjamin Chui has broad experience in MEMS and Nanotechnology including MEMS-related background research, design, layout, and fabrication, with a focus on device prototyping and process development. Ben graduated from Stanford University in 1998 with a Ph.D. degree in electrical engineering under Prof. Tom Kenny. He has subsequently worked in various settings including a optical MEMS startup company, IBM Almaden Research Center, and the Institute of Microtechnology in Neuchatel, Switzerland. He has strong expertise in developing AFM cantilevers and has extensive processing experience at the Stanford Nanofabrication Facility, prototyping a wide range of microdevices for electrical, optical, fluidic, medical and atomic-level sensing applications. Dr. Chui has published one book and numerous papers on MEMS-related subjects. He has been a MEMS consultant since 2005, specializing in design, layout and prototyping.

Specialties:

• MEMS device design and layout
• Process development for new designs
• Hands-on fabrication of prototype devices
• Device testing and optimization
• Liaison with external foundries for transfer to manufacturing
• Scientific/engineering illustration and animation

Work Experience:

Lightconnect, Inc.
IBM Almaden Research Center
Institute of Microtechnology, Neuchatel, Switzerland

Education:

Stanford University
   Ph.D., Electrical Engineering